[labnetwork] On-line teaching reference for simple microfabrication
Allison Dove
adove at berkeley.edu
Wed Feb 17 15:49:56 EST 2021
We have a bunch of these materials in our Equipment manual
<https://nanolab.berkeley.edu/public/manuals/equipment_manual.shtml>.
Look for any link with the word "class". There are slides as well as videos.
Lithoclass:
https://docs.google.com/document/d/180PVAoG4aHmo6MvY8xEEAdhE9btpokxOwNKk2_wmMso/edit#heading=h.2w3i6baqm8n8
Evapclass:
https://docs.google.com/document/d/1OjWWVVjChGvfVVLsB9EmjXsRyu27mAst-DRUfGdiY-U/edit
Etchclass:
https://docs.google.com/document/d/1SPxL8MlCYzybYCHoS-A-eFuDolS3CyHToNwhNha1e40/edit
-Allison
On Wed, Feb 17, 2021 at 12:43 PM James C. Sturm <sturm at princeton.edu> wrote:
> I’m looking for a simple straightforward on-line teaching reference for
> simple microfabrication with clear schematic step by step figures.
>
> i. How you can use photolithography to pattern a
> selective etch, or for liftoff,
>
> ii. Some figures and qualitative description of some
> different thin film formation or deposition methods
>
> iii. A few simple integrated processes to make a device
> of some sort.
>
> I’m sure they are out there.
>
> Thanks, Jim Sturm
>
>
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--
Allison Dove
Process Engineer
Marvell Nanofabrication Laboratory
UC Berkeley
adove at berkeley.edu
Pronouns: she/her
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