[labnetwork] On-line teaching reference for simple microfabrication

Walsh,Kevin M. kevin.walsh at louisville.edu
Wed Feb 17 16:43:48 EST 2021


If you locate them, could you share a list with the network.  That would be very helpful!

Thanks,
Kevin

From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of James C. Sturm
Sent: Wednesday, February 17, 2021 1:17 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] On-line teaching reference for simple microfabrication

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I'm looking for a simple straightforward on-line teaching reference for simple microfabrication with clear schematic step by step figures.

i.                     How you can use photolithography to pattern a selective etch, or for liftoff,

ii.                   Some figures and qualitative description of some different thin film formation or deposition methods

iii.                  A few simple integrated processes to make a device of some sort.
I'm sure they are out there.
Thanks, Jim Sturm

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