[labnetwork] On-line teaching reference for simple microfabrication
Stephen Howe
info at fabsurplus.com
Thu Feb 18 03:06:48 EST 2021
MKS wrote "MKS Instruments Handbook Semiconductor Devices and Process
Technology" which is a good overview of everything.I think you can
download the PDF from their website still , or else you could send an
email to the Office of the CTO.
--
Yours Sincerely,
SDI Fabsurplus LLC
Stephen Howe
Company Owner
email: info at fabsurplus.com
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On Wed, 2021-02-17 at 17:51 -0500, Orad Reshef wrote:
> Hey Jim,
>
> I drafted a helpful intro chapter that I share with my students.
> Maybe this can be helpful to you:
>
http://reshef.ca/wp-content/uploads/2019/04/2017-Reshef-Introduction-to-Nanofabrication.pdf
> Best,
> Orad
>
> On Wed, Feb 17, 2021 at 5:19 PM James C. Sturm <sturm at princeton.edu>
> wrote:
> >
> >
> >
> >
> >
> >
> > I’m looking for a simple straightforward on-line teaching reference
> > for simple microfabrication with clear schematic step by step
> > figures.
> >
> >
> > i.
> > How you can use photolithography to pattern a selective etch, or
> > for liftoff,
> >
> > ii.
> > Some figures and qualitative description of some different thin
> > film formation or deposition methods
> >
> > iii.
> > A few simple integrated processes to make a device of some sort.
> > I’m sure they are out there.
> > Thanks, Jim Sturm
> >
> >
> >
> >
> > _______________________________________________
> >
> > labnetwork mailing list
> >
> > labnetwork at mtl.mit.edu
> >
> > https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
> >
>
> --
> Orad Reshef, PhD
>
> Département de physique | Department of Physics
> Université d’Ottawa | University of Ottawa
> boydnlo.ca | reshef.ca
>
>
> _______________________________________________labnetwork mailing
> listlabnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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