[labnetwork] Recommendation for small footprint LPCVD system?

[Étienne Grondin]

Hello Mario,

Same issue here in Sherbrooke. We plan to purchase a replacement for our furnace in the coming years so I’ve started my search and had some fruitful discussions with these guys : exper-tech.com, Barrie VanDevender <bvd at exper-tech.com<mailto:bvd at exper-tech.com>>. You could consider the compact models. I’m curious of what these small footprint systems can achieve.

Best regards,

Étienne Grondin
Coordonnateur de laboratoire
3IT Université de Sherbrooke
e.grondin at usherbrooke.ca<mailto:e.grondin at usherbrooke.ca>
(819) 821-8000 poste 61941
[cid:image003.jpg at 01D70995.D3C7E930]<https://www.usherbrooke.ca/3it/fr/>



De : labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> De la part de Beaudoin, Mario
Envoyé : 22 février 2021 18:46
À : labnetwork at mtl.mit.edu
Cc : Gou, Steven <steven.gou at ubc.ca>
Objet : [labnetwork] Recommendation for small footprint LPCVD system?


Dear Labnetwork experts,

We're looking to purchase an LPCVD system to deposit SiN and SiO2 for silicon photonics.  We have low volumes but occasionally need to deposit on 200mm wafers.  Ideally, we would prefer a vertical system that only needs to accommodate one 200 mm wafer on occasion while most of the work will be on multiple smaller samples (eg 25x25mm).

Any suggestions or recommendations are welcomed.

Mario
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