[labnetwork] Recommendation for small footprint LPCVD system?

[Beaudoin, Mario]

Dear Labnetwork experts,

We're looking to purchase an LPCVD system to deposit SiN and SiO2 for 
silicon photonics.  We have low volumes but occasionally need to deposit 
on 200mm wafers.  Ideally, we would prefer a vertical system that only 
needs to accommodate one 200 mm wafer on occasion while most of the work 
will be on multiple smaller samples (eg 25x25mm).

Any suggestions or recommendations are welcomed.

Mario

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