[labnetwork] Low Z passivating layer
Miller, Dale A.
dale at slac.stanford.edu
Fri Jan 22 12:30:19 EST 2021
Labnetwork,
I am developing a ~1.5 microns of SiO2 via a Sloan RF magnetron. I am running at 10mT, 200 watts with a Cu substrate at ~ 300 degree C. I am getting a slightly brown film that seems to be conductive. Anybody have any ideas? Any ideas of other materials to deposit to get a passivating layer?
Thanks,
Dale Miller
Master Science and Engineering Technician
APFD -Coating Lab
SLAC National Accelerator Laboratory
926-5202
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20210122/d7ced636/attachment.html>
More information about the labnetwork
mailing list