[labnetwork] Tepla PS210 question

[Robert Vandusen]

Hello community.
I have a question for anyone who may have a Tepla PS210 plasma ashing system.
We have noticed that our plasma may look dimmer and more unstable than normal.
We seem to be etching but need to verify our etch rates.

One of the things we noticed is that even thought actual power output display on the runscreen is reading the setpoint of 500W,
on the maintenance screen we see a value of ~ 120 on the output.  I would have expected this to read to close to the setpoint,
but we are not completely sure if this is problem as we hadn't looked at this before.
Tepla hasn't  been able to confirm for sure whether this is a problem.
If someone would be able to check on another system to confirm that would be great.
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Thanks
Rob
Robert Vandusen
Technical Officer, Microfabrication Lab
Electronics Department
Carleton University
room: 4184 Mackenzie Building
613-520-2600<tel:613-520-2600> ext 5761
Robert_vandusen at cunet.carleton.ca<mailto:Robert_vandusen at cunet.carleton.ca>

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