[labnetwork] Tepla PS210 question

[Jeff Salzmann]

Robert,

If you can observe it, see how long the match takes to tune. You might have a blown air-cap (they arc from time to time) and they'll try to tune for a long period of time.

I don't use a Tepla system but I have seen this on old Matrix ashers in need of new match networks.

Any questions, contact me directly.

Good luck,
Jeff


[cid:image001.png at 01D6F33A.7AC67ED0]<http://www.pcb.com/>


Jeff Salzmann
Research and Development Engineering
PCB Piezotronics<http://www.pcb.com/> | 716 684 0002 ext 2907


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From: labnetwork-bounces at mtl.mit.edu <labnetwork-bounces at mtl.mit.edu> On Behalf Of Robert Vandusen
Sent: Monday, January 25, 2021 14:35
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Tepla PS210 question


External Email Notice: This email originated from outside the MTS / PCB organization.



Hello community.
I have a question for anyone who may have a Tepla PS210 plasma ashing system.
We have noticed that our plasma may look dimmer and more unstable than normal.
We seem to be etching but need to verify our etch rates.

One of the things we noticed is that even thought actual power output display on the runscreen is reading the setpoint of 500W,
on the maintenance screen we see a value of ~ 120 on the output.  I would have expected this to read to close to the setpoint,
but we are not completely sure if this is problem as we hadn't looked at this before.
Tepla hasn't  been able to confirm for sure whether this is a problem.
If someone would be able to check on another system to confirm that would be great.
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Thanks
Rob
Robert Vandusen
Technical Officer, Microfabrication Lab
Electronics Department
Carleton University
room: 4184 Mackenzie Building
613-520-2600<tel:613-520-2600> ext 5761
Robert_vandusen at cunet.carleton.ca<mailto:Robert_vandusen at cunet.carleton.ca>

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