[labnetwork] Hotplate options for resist baking

[Morrison, Richard H., Jr]

Hi Aimee,

Here at Draper we use Wensco very good flat accurate hot plates, these are our hot plates for resist bake.

WENESCO INC
3057 N ROCKWELL STREET
CHICAGO IL 60618
United States


Richard Morrison
PMTS
Draper Laboratory
555 Technology Square
Cambridge Ma  02139
Office: 617-258-3420
Cell: 508-930-3461



From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Price, Aimee
Sent: Tuesday, July 6, 2021 12:41 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Hotplate options for resist baking

Hello everyone,
We are looking for a  couple standalone hotplates for resist soft and hard bakes.  We have one nice, uniform hotplate attached to one of our CEE coaters.  However, it takes a long time to change temps and doesn’t get used as much as it should.  The lab hotplates we have are ok for general lab use and not cheap, but are not uniform or reproducible enough for resist baking for sensitive processes (I think that means all processes😊).

I’m sure I’ll be overwhelmed with ideas, so thanks in advance.  What are your suggestions for resist bake hotplates with uniformity of at least +/- 1 deg F?  I do not necessarily need vacuum or proximity, in fact would likely rather not have those options.

Best,
Aimee

Sr. Research Associate
The Ohio State University
Nanotech West Lab
Institute for Materials Research
1381 Kinnear Road
Suite 100
Columbus, OH 43212
614-292-2753

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