[labnetwork] Hotplate options for resist baking

[Lino Eugene]

Hi Aimee,

Back in 2015, I purchased an EMS 1000-1 hotplate from Electronic Micro Systems in UK.
http://electronicmicrosystems.co.uk/products/hot-plate-1000-1/

I was happy with this hotplate and the customer service.

Best,

Lino Eugene, P.Eng., Ph.D.,
Micro/nanofabrication process engineer
Quantum-Nano Fabrication and Characterization Facility
QNC 1611
University of Waterloo
200 University Avenue West
Waterloo, ON, Canada
N2L 3G1

Ph: +1 519-888-4567 #37788
Cell: +1 226-929-1685
Website: https://qnfcf.uwaterloo.ca/



De : labnetwork <labnetwork-bounces at mtl.mit.edu> De la part de Price, Aimee
Envoyé : 6 juillet 2021 12:41
À : labnetwork at mtl.mit.edu
Objet : [labnetwork] Hotplate options for resist baking

Hello everyone,
We are looking for a  couple standalone hotplates for resist soft and hard bakes.  We have one nice, uniform hotplate attached to one of our CEE coaters.  However, it takes a long time to change temps and doesn’t get used as much as it should.  The lab hotplates we have are ok for general lab use and not cheap, but are not uniform or reproducible enough for resist baking for sensitive processes (I think that means all processes😊).

I’m sure I’ll be overwhelmed with ideas, so thanks in advance.  What are your suggestions for resist bake hotplates with uniformity of at least +/- 1 deg F?  I do not necessarily need vacuum or proximity, in fact would likely rather not have those options.

Best,
Aimee

Sr. Research Associate
The Ohio State University
Nanotech West Lab
Institute for Materials Research
1381 Kinnear Road
Suite 100
Columbus, OH 43212
614-292-2753

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