[labnetwork] ICP STS ASE Issue

[Aebersold,Julia W.]

Make sure your litho is clean, your C4F8 cycle may be too long or your SF6 cycle is too short.

Cheers!

Julia Aebersold, Ph.D.
Manager, Micro/Nano Technology Center
University of Louisville
Shumaker Research Building, Room 233
2210 South Brook Street
Louisville, KY  40292
(502) 852-1572

http://louisville.edu/micronano/

From: labnetwork [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of N P Vamsi Krishna
Sent: Wednesday, July 21, 2021 4:41 PM
To: Shepard, Jeremiah J <jshepar at purdue.edu>
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] ICP STS ASE Issue

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Hi Jerry,
As Dave suggested, I would also doubt the Helium leak issue if it's an electrostatic chuck. Try to see if any of the wafer lift pins are bent/protruding out or any silicon particle is stuck in the wafer lift pins area. Also, see if all the pins are rising and lowering uniformly. You may want to open the box under the chamber and see if the wafer pins are rising and lowering or any of your low-temperature cooling lines are obstructing the movements.
Other things I would check is if the Peak-Peak voltage (Vpp) and the bias voltage are consistent with your previous runs.

Hope this helps.

Thanks & Regards,
Vamsi


On Wed, Jul 21, 2021 at 10:53 AM Shepard, Jeremiah J <jshepar at purdue.edu<mailto:jshepar at purdue.edu>> wrote:
I am having some trouble determining what this issue is? We have found a bad capacitor in the matching network, and replaced that, thought all was good but now we face this issue.

Now I am having trouble with grass formation on student sample. Anyone know where to look for this kind of thing? Is it just sample recipe or something else perhaps? Any thoughts are appreciated! Also unsure of what's going on with the carrier wafer around the sample...?

Thanks,
Jerry Shepard

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--

___________________________________________________
N.P.  Vamsi Krishna, PhD
Staff Scientist

Pritzker School of Molecular Engineering, The University of Chicago

Resident Associate

Center for Nanoscale Materials, Argonne National Laboratory

Phone: 1 (331) 757-8565
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