[labnetwork] ICP STS ASE Issue

[N P Vamsi Krishna]

Hi Jerry,
As Dave suggested, I would also doubt the Helium leak issue if
it's an electrostatic chuck. Try to see if any of the wafer lift pins are
bent/protruding out or any silicon particle is stuck in the wafer lift pins
area. Also, see if all the pins are rising and lowering uniformly. You may
want to open the box under the chamber and see if the wafer pins are rising
and lowering or any of your low-temperature cooling lines are obstructing
the movements.
Other things I would check is if the Peak-Peak voltage (Vpp) and the bias
voltage are consistent with your previous runs.

Hope this helps.

Thanks & Regards,
Vamsi


On Wed, Jul 21, 2021 at 10:53 AM Shepard, Jeremiah J <jshepar at purdue.edu>
wrote:

> I am having some trouble determining what this issue is? We have found a
> bad capacitor in the matching network, and replaced that, thought all was
> good but now we face this issue.
>
> Now I am having trouble with grass formation on student sample. Anyone
> know where to look for this kind of thing? Is it just sample recipe or
> something else perhaps? Any thoughts are appreciated! Also unsure of what's
> going on with the carrier wafer around the sample...?
>
> Thanks,
> Jerry Shepard
>
>
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-- 

___________________________________________________

N.P.  Vamsi Krishna, PhD

*Staff Scientist*

Pritzker School of Molecular Engineering, *The University of Chicago *

*Resident **Associate*

Center for Nanoscale Materials, *Argonne National Laboratory *

Phone: 1 (331) 757-8565
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