[labnetwork] Hydrogen Bromide Seal Compatibility

John Nicholson thejohnnicholson at gmail.com
Mon Jun 7 13:33:21 EDT 2021


I'm retiring this month after minding the UMass/Amherst clean rooms solo
since 2008 and have a few last minute equipment configuration issues to
complete.

HBr has been added to our RIE system and the line fitting is a CGA 330
while the tank ordered by a professor is a 634 fitting (nickel seals). I
have a 634 to 330 tank adapter but am unsure whether the Teflon seals used
with the 330 end would be compatible with HBr. Any advice would be
appreciated.

Best regards and thanks for the assistance over the years,

-- 
John Nicholson
Nanofabrication Laboratory Manager
Silvio O. Conte Center for Polymer Research, Rm. B111
University of Massachusetts Amherst
120 Governor's Drive
Amherst,MA 01003-9305
Phone: 413-545-2772
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