[labnetwork] Hydrogen Bromide Seal Compatibility

Tom Britton tbritton at criticalsystemsinc.com
Mon Jun 7 16:32:32 EDT 2021


Hi John,

Looks like the professor wants to upgrade to a high purity cylinder connection. For this type of gas (corrosives) I would strongly advise not using the adapter, but rather making a new pigtail with just the DISS connection, and avoid elastomeric seals totally. HBr loves water and really makes a mess if it sees any, even if it's just trace amounts.

We see many people replacing their regulators and/or gas panels due to the interaction of moisture with HBr, either during cylinder changes, or through the use of low purity purge gas. For our gas systems, we use all metal seals, DISS cylinder connections, and if the customer cannot absolutely guarantee 5-9s on their purge gas, a purge gas purifier. Set up this way, the interior of the process line, the panel, regulator, etc. will last a long time in service.

If I can help in any way, just ask.

All the best,

Tom

Tom Britton
Director of Sales
Critical Systems, Inc.
Direct: 208.890.1417
Office: 877.572.5515
Skype: tombrittoncsi
www.CriticalSystemsInc.com<http://www.criticalsystemsinc.com/>

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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of John Nicholson
Sent: Monday, June 7, 2021 11:33 AM
To: Labnetwork <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Hydrogen Bromide Seal Compatibility

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I'm retiring this month after minding the UMass/Amherst clean rooms solo since 2008 and have a few last minute equipment configuration issues to complete.

HBr has been added to our RIE system and the line fitting is a CGA 330 while the tank ordered by a professor is a 634 fitting (nickel seals). I have a 634 to 330 tank adapter but am unsure whether the Teflon seals used with the 330 end would be compatible with HBr. Any advice would be appreciated.

Best regards and thanks for the assistance over the years,

--
John Nicholson
Nanofabrication Laboratory Manager
Silvio O. Conte Center for Polymer Research, Rm. B111
University of Massachusetts Amherst
120 Governor's Drive
Amherst,MA 01003-9305
Phone: 413-545-2772
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