[labnetwork] vanadium dioxide sputtering

[Iulian Codreanu]

Hi Darick,

We have a pulsed laser deposition (PLD) system here at UD which is 
mostly used for Vanadium oxide deposition. PLD is more suited for 
depositing oxides than sputtering.

Please send me a note if you would like to discuss.

Cheers,

Iulian


iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
http://udnf.udel.edu

On 6/9/2021 7:43 PM, Darick Baker wrote:
> We have a lab user who is interested in sputtering vanadium dioxide. I 
> realize this has been asked before without an answer, but I thought 
> I'd try again. Does anybody have a VO2 process running and would be 
> willing to do some depositions for us?
> Barring that, does anybody have any tips or successes with reactively 
> sputtering VO2?
>
> Thanks for the help.
>
> -- 
> Darick Baker, PhD
> Business Outreach and Customer Development
> New User Orientation
> Research Engineer - Deposition
> Washington Nanofabrication Facility (WNF)
> University of Washington
> Fluke Hall 115, Box 352143
> Desk: 206.221.8265 Cell: 206.395.4049
> fab-support at wnf.uw.edu <mailto:fab-support at wnf.uw.edu>
> https://www.wnf.washington.edu/ <https://www.wnf.washington.edu/>
> Pronouns: he/him
>
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