[labnetwork] vanadium dioxide sputtering

Darick Baker darick at uw.edu
Wed Jun 9 19:43:53 EDT 2021


We have a lab user who is interested in sputtering vanadium dioxide. I
realize this has been asked before without an answer, but I thought I'd try
again. Does anybody have a VO2 process running and would be willing to do
some depositions for us?
Barring that, does anybody have any tips or successes with reactively
sputtering VO2?

Thanks for the help.

-- 
Darick Baker, PhD
Business Outreach and Customer Development
New User Orientation
Research Engineer - Deposition
Washington Nanofabrication Facility (WNF)
University of Washington
Fluke Hall 115, Box 352143
Desk: 206.221.8265 Cell: 206.395.4049
fab-support at wnf.uw.edu
https://www.wnf.washington.edu/
Pronouns: he/him
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