[labnetwork] vanadium dioxide sputtering

[Geil, Bob]

Hi Darick,
  One tip is that room temperate reactive sputtering with V and O2 results in V2O5.  Achieving VO2 requires a deposition temp around 200C or higher.

Best,
Bob

Bob Geil, PhD
Technical Director • CHANL
Applied Physical Sciences • UNC-CH
223 Chapman Hall
(919) 843-6555
https://chanl.unc.edu/
[cid:f47b9cc9-feb7-4bf1-ba23-1b16f8c16dc5]



________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Darick Baker <darick at uw.edu>
Sent: Wednesday, June 9, 2021 7:43 PM
To: Fab Network <labnetwork at mtl.mit.edu>
Subject: [labnetwork] vanadium dioxide sputtering

We have a lab user who is interested in sputtering vanadium dioxide. I realize this has been asked before without an answer, but I thought I'd try again. Does anybody have a VO2 process running and would be willing to do some depositions for us?
Barring that, does anybody have any tips or successes with reactively sputtering VO2?

Thanks for the help.

--
Darick Baker, PhD
Business Outreach and Customer Development
New User Orientation
Research Engineer - Deposition
Washington Nanofabrication Facility (WNF)
University of Washington
Fluke Hall 115, Box 352143
Desk: 206.221.8265 Cell: 206.395.4049
fab-support at wnf.uw.edu<mailto:fab-support at wnf.uw.edu>
https://www.wnf.washington.edu/
Pronouns: he/him
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20210610/311a9138/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: Outlook-oko5zyqz.png
Type: image/png
Size: 5201 bytes
Desc: Outlook-oko5zyqz.png
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20210610/311a9138/attachment.png>