[labnetwork] vanadium dioxide sputtering

[Fouad Karouta]

Hi Darick and others,

Please check the toxicity of the material especially when you do get V2O5.
Several years ago we banned VO2 target from use in a system where we were
swapping targets twice a week due to that risk.
Better to have a dedicated machine to deposit this material.

Regards,
Fouad Karouta
Ex manager ANFF ACT Node
Canberra, Australia

On Thu, 10 Jun 2021 at 9:59 am, Darick Baker <darick at uw.edu> wrote:

> We have a lab user who is interested in sputtering vanadium dioxide. I
> realize this has been asked before without an answer, but I thought I'd try
> again. Does anybody have a VO2 process running and would be willing to do
> some depositions for us?
> Barring that, does anybody have any tips or successes with reactively
> sputtering VO2?
>
> Thanks for the help.
>
> --
> Darick Baker, PhD
> Business Outreach and Customer Development
> New User Orientation
> Research Engineer - Deposition
> Washington Nanofabrication Facility (WNF)
> University of Washington
> Fluke Hall 115, Box 352143
> Desk: 206.221.8265 Cell: 206.395.4049
> fab-support at wnf.uw.edu
> https://www.wnf.washington.edu/
> Pronouns: he/him
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