[labnetwork] Plasmatherm Apex ICP High Temperature Operation

[LaFleur, David W]

Hi Bruce

There are 2 ways I know of, an inexpensive way and an expensive way. The inexpensive way is to use thermal dots sold here:

https://www.mcmaster.com/temperature-indicating-dots/

Expensive way is using  SensArray.

https://www.kla-tencor.com/products/chip-manufacturing/in-situ-process-management.

Regards,

Dave LaFleur
Harvard University
CNS

From: "labnetwork-bounces at mtl.mit.edu" <labnetwork-bounces at mtl.mit.edu> on behalf of Bruce Tolleson <betemc at rit.edu>
Date: Wednesday, June 23, 2021 at 11:42 AM
To: "labnetwork at mtl.mit.edu" <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Plasmatherm Apex ICP High Temperature Operation

Dear Labnetwork,
  Our Plasmatherm Apex ICP has the high temperature option installed to run as high as 200°C.  We are trying to determine the actual temperature of the lower electrode to substrate contact. The display temperature verses actual temperature has an offset and we are trying to determine what that offset is. Has anyone else been able to measure this?
Thank you,

Bruce E. Tolleson
Rochester Institute of Technology
82  Lomb Memorial Drive, Bldg 17-2627
Rochester, NY 14623-5604
(585) 478-3836
[http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]

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