[labnetwork] Plasmatherm Apex ICP High Temperature Operation

[Robert MacDonald]

And you can make your own TC wafer. If you only need one tc omega sells thin wire type 

Bond between wafers with thermal epoxy. 

Strip insulation where wires cross oring and reinsulate with Kapton.  

Works well enough generally. 

Thanks,

Rob 

Sent from my iDidntspellcheckit

> On Jun 23, 2021, at 9:11 PM, Lino Eugene <lino.eugene at uwaterloo.ca> wrote:
> 
> I did cover thermal dots with Kapton tape or discs to check the wafer temperature during plasma etching. I did not see any issue in vacuum although the temperature did not exceeded 100⁰C. Kapton tape can withstand temperatures up to 260⁰C, so it should be ok.
>  
> Best,
>  
> Lino Eugene, P.Eng., Ph.D.,
> Micro/nanofabrication process engineer
> Quantum-Nano Fabrication and Characterization Facility
> QNC 1611
> University of Waterloo
> 200 University Avenue West
> Waterloo, ON, Canada  
> N2L 3G1
>  
> Ph: +1 519-888-4567 #37788
> Cell: +1 226-929-1685
> Website: https://qnfcf.uwaterloo.ca/
>  
>  
>  
> De : labnetwork <labnetwork-bounces at mtl.mit.edu> De la part de Jeremy Clark
> Envoyé : 23 juin 2021 16:20
> À : labnetwork at mtl.mit.edu
> Objet : Re: [labnetwork] Plasmatherm Apex ICP High Temperature Operation
>  
> The trick with the dots is that you need to press them hard and flat to the wafer, as the vacuum tries to pull them up and away from the surface, thus defeating the purpose of measuring the temperature of a surface.
> 
> Also leave the wafer in there for a few minutes- or wait and don't wait with separate dots and see the difference!
> 
>  
> 
> Jeremy Clark
> 
> Cornell Nanoscale Facility
> 
> On 6/23/21 1:16 PM, LaFleur, David W wrote:
> Hi Bruce
>  
> There are 2 ways I know of, an inexpensive way and an expensive way. The inexpensive way is to use thermal dots sold here:
>  
> https://www.mcmaster.com/temperature-indicating-dots/
>  
> Expensive way is using  SensArray.
>  
> https://www.kla-tencor.com/products/chip-manufacturing/in-situ-process-management.
>  
> Regards,
>  
> Dave LaFleur
> Harvard University
> CNS
>  
> From: "labnetwork-bounces at mtl.mit.edu" <labnetwork-bounces at mtl.mit.edu> on behalf of Bruce Tolleson <betemc at rit.edu>
> Date: Wednesday, June 23, 2021 at 11:42 AM
> To: "labnetwork at mtl.mit.edu" <labnetwork at mtl.mit.edu>
> Subject: [labnetwork] Plasmatherm Apex ICP High Temperature Operation
>  
> Dear Labnetwork,
>   Our Plasmatherm Apex ICP has the high temperature option installed to run as high as 200°C.  We are trying to determine the actual temperature of the lower electrode to substrate contact. The display temperature verses actual temperature has an offset and we are trying to determine what that offset is. Has anyone else been able to measure this?
> Thank you,
>  
> Bruce E. Tolleson
> Rochester Institute of Technology
> 82  Lomb Memorial Drive, Bldg 17-2627
> Rochester, NY 14623-5604
> (585) 478-3836
> <image001.jpg>
>  
> 
> 
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