[labnetwork] Plasmatherm Apex ICP High Temperature Operation

[Lino Eugene]

I did cover thermal dots with Kapton tape or discs to check the wafer temperature during plasma etching. I did not see any issue in vacuum although the temperature did not exceeded 100⁰C. Kapton tape can withstand temperatures up to 260⁰C, so it should be ok.

Best,

Lino Eugene, P.Eng., Ph.D.,
Micro/nanofabrication process engineer
Quantum-Nano Fabrication and Characterization Facility
QNC 1611
University of Waterloo
200 University Avenue West
Waterloo, ON, Canada
N2L 3G1

Ph: +1 519-888-4567 #37788
Cell: +1 226-929-1685
Website: https://qnfcf.uwaterloo.ca/



De : labnetwork <labnetwork-bounces at mtl.mit.edu> De la part de Jeremy Clark
Envoyé : 23 juin 2021 16:20
À : labnetwork at mtl.mit.edu
Objet : Re: [labnetwork] Plasmatherm Apex ICP High Temperature Operation


The trick with the dots is that you need to press them hard and flat to the wafer, as the vacuum tries to pull them up and away from the surface, thus defeating the purpose of measuring the temperature of a surface.

Also leave the wafer in there for a few minutes- or wait and don't wait with separate dots and see the difference!



Jeremy Clark

Cornell Nanoscale Facility
On 6/23/21 1:16 PM, LaFleur, David W wrote:
Hi Bruce

There are 2 ways I know of, an inexpensive way and an expensive way. The inexpensive way is to use thermal dots sold here:

https://www.mcmaster.com/temperature-indicating-dots/

Expensive way is using  SensArray.

https://www.kla-tencor.com/products/chip-manufacturing/in-situ-process-management.

Regards,

Dave LaFleur
Harvard University
CNS

From: "labnetwork-bounces at mtl.mit.edu"<mailto:labnetwork-bounces at mtl.mit.edu> <labnetwork-bounces at mtl.mit.edu><mailto:labnetwork-bounces at mtl.mit.edu> on behalf of Bruce Tolleson <betemc at rit.edu><mailto:betemc at rit.edu>
Date: Wednesday, June 23, 2021 at 11:42 AM
To: "labnetwork at mtl.mit.edu"<mailto:labnetwork at mtl.mit.edu> <labnetwork at mtl.mit.edu><mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] Plasmatherm Apex ICP High Temperature Operation

Dear Labnetwork,
  Our Plasmatherm Apex ICP has the high temperature option installed to run as high as 200°C.  We are trying to determine the actual temperature of the lower electrode to substrate contact. The display temperature verses actual temperature has an offset and we are trying to determine what that offset is. Has anyone else been able to measure this?
Thank you,

Bruce E. Tolleson
Rochester Institute of Technology
82  Lomb Memorial Drive, Bldg 17-2627
Rochester, NY 14623-5604
(585) 478-3836
[http://www.rit.edu/~962www/logos/tiger_walking_rit_color.jpg]




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