[labnetwork] Gas Purity Grade for RIE

[Dr. Loïk Gence]

Hi All,

I hope you are all fine and safe.

We are planning the installation of our first RIE with chlorine and 
Fluorine chemistries.

I was wondering, what are purity grade of the gases you are using.  
Always electronic grade, 5.0 grade or above ?  To avoid potential 
contamination of the gas lines, chamber, etc...  of course, choosing the 
best purity available is a solution. However, thinking about the 
cost/utility for standard etching processes, and with potential problem 
of local availability of high grade, what grade range would you consider 
safe for the equipment and standard processes?

Thanks in advance for your comment.


Best,

Loïk



-- 

Dr. Loïk Gence
Assistant Professor
Instituto de Física
Pontificia Universidad Católica de Chile
Avda. Vicuña Mackenna 4860,
CP 7820436 Santiago
Lab: +56 95504 9648