[labnetwork] Gas Purity Grade for RIE

[Keith Barnes]

Why not use a purifier?

Sent from my iPhone

> On May 13, 2021, at 4:38 PM, Dr. Loïk Gence <loik.gence at fis.puc.cl> wrote:
> 
> Hi All,
> 
> I hope you are all fine and safe.
> 
> We are planning the installation of our first RIE with chlorine and Fluorine chemistries.
> 
> I was wondering, what are purity grade of the gases you are using.  Always electronic grade, 5.0 grade or above ?  To avoid potential contamination of the gas lines, chamber, etc...  of course, choosing the best purity available is a solution. However, thinking about the cost/utility for standard etching processes, and with potential problem of local availability of high grade, what grade range would you consider safe for the equipment and standard processes?
> 
> Thanks in advance for your comment.
> 
> 
> Best,
> 
> Loïk
> 
> 
> 
> -- 
> 
> Dr. Loïk Gence
> Assistant Professor
> Instituto de Física
> Pontificia Universidad Católica de Chile
> Avda. Vicuña Mackenna 4860,
> CP 7820436 Santiago
> Lab: +56 95504 9648
> 
> 
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