[labnetwork] Gas Purity Grade for RIE

[Shimon Eliav]

Hi Loïk,

Please see below the list of gases we have installed here at UNF-HUJI. This set-up is running for more than ten years (with periodic cylinder exchanges) providing repeatable results.

Regards,

Shimon

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-----Original Message-----
From: labnetwork [mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Dr. Loïk Gence
Sent: Thursday, 13 May 2021 23:16
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Gas Purity Grade for RIE



Hi All,



I hope you are all fine and safe.



We are planning the installation of our first RIE with chlorine and Fluorine chemistries.



I was wondering, what are purity grade of the gases you are using. Always electronic grade, 5.0 grade or above ?  To avoid potential contamination of the gas lines, chamber, etc...  of course, choosing the best purity available is a solution. However, thinking about the cost/utility for standard etching processes, and with potential problem of local availability of high grade, what grade range would you consider safe for the equipment and standard processes?



Thanks in advance for your comment.





Best,



Loïk







--



Dr. Loïk Gence

Assistant Professor

Instituto de Física

Pontificia Universidad Católica de Chile Avda. Vicuña Mackenna 4860, CP 7820436 Santiago

Lab: +56 95504 9648





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