[labnetwork] Gas Purity Grade for RIE

[Beaudoin, Mario]

We are using 5.0 gases for ICP and ECR RIE here at UBC with good results.

M.

On 2021-05-13 5:52 p.m., Dr. Loïk Gence wrote:
> [CAUTION: Non-UBC Email]
>
> Hi Keith,
>
> Thanks for your comment.
>
> that would be great. However, a purifier would represent additional 
> costs of equipment and maintenance that seems expensive.
>
> We are talking about a small university cleanroom, and this will be 
> the first RIE in Chile.
>
> The matter is mainly for SF6, Cl2, BCl3, CHF3, and CF4. I guess, 
> purification of BCl3 and Cl2 is not that easy.
>
>
> Best,
>
> Loïk
>
>
> Le 13/05/2021 à 20:08, Keith Barnes a écrit :
>> Why not use a purifier?
>>
>> Sent from my iPhone
>>
>>> On May 13, 2021, at 4:38 PM, Dr. Loïk Gence <loik.gence at fis.puc.cl> 
>>> wrote:
>>>
>>> Hi All,
>>>
>>> I hope you are all fine and safe.
>>>
>>> We are planning the installation of our first RIE with chlorine and 
>>> Fluorine chemistries.
>>>
>>> I was wondering, what are purity grade of the gases you are using.  
>>> Always electronic grade, 5.0 grade or above ?  To avoid potential 
>>> contamination of the gas lines, chamber, etc...  of course, choosing 
>>> the best purity available is a solution. However, thinking about the 
>>> cost/utility for standard etching processes, and with potential 
>>> problem of local availability of high grade, what grade range would 
>>> you consider safe for the equipment and standard processes?
>>>
>>> Thanks in advance for your comment.
>>>
>>>
>>> Best,
>>>
>>> Loïk
>>>
>>>
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
-- 
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20210514/c53a8337/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: Mario Beaudoin SBQMI sig 2.jpg
Type: image/jpeg
Size: 21446 bytes
Desc: not available
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20210514/c53a8337/attachment.jpg>