[labnetwork] ISO 5 Cleanroom RH

[Aju Jugessur]

Hello all,

I am reaching out to obtain some inputs on your cleanroom relative humidity (RH).
We have designed our ISO 5 cleanroom with RH (40 +/- 5 %). Among other cleanroom fabrication processes, the cleanroom will support EBeam nanolithography work.
The system to control RH within the required specs is quite expensive and I would like to know if anyone in the network is able to relax the RH specs, without compromising processes OR have alternative ways of locally controlling the RH, say in the actual litho. bay areas or hoods?

Your inputs are very much appreciated.

Thanks
Aju




Aju Jugessur Ph.D. IEEE Sr. Member
Director, Colorado Shared Instrumentation
in Nanofabrication and Characterization (COSINC) Facility
Member of Inclusive Culture Council (ICC)
Member of Engineering Staff Council (ESC)
University of Colorado Boulder | College of Engineering & Applied Science
4001 Discovery Drive, N360G SEEC | Boulder, CO 80303| P: 303.735.5019
E-mail: aju.jugessur at colorado.edu<mailto:aju.jugessur at colorado.edu>
Personal Zoom link: https://cuboulder.zoom.us/my/ajugessur
www.colorado.edu/facility/cosinc<http://www.colorado.edu/facility/cosinc>

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