[labnetwork] ISO 5 Cleanroom RH

[Morrison, Richard H., Jr]

The Draper clean room is 7700sqft of mixed use cleanrooms . Our makeup air unit provides 22000 cfm or 68F +-2F  and 45% RHM +-3%. It uses a steam generator with a dispersion coil in the main duct to add steam in the winter and a cooling coil to reduce RH in the summer. When we designed the cleanroom we asked this forum what our RH spec should be and it was clear that 45% was the preferred RH.

Rick


Richard Morrison
PMTS
Draper Laboratory
555 Technology Square
Cambridge Ma  02139
Office: 617-258-3420
Cell: 508-930-3461


From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Aju Jugessur
Sent: Monday, October 11, 2021 3:50 PM
To: labnetwork at mtl.mit.edu
Cc: labnetwork <labnetwork-bounces at mtl.mit.edu>
Subject: [labnetwork] ISO 5 Cleanroom RH


Hello all,

I am reaching out to obtain some inputs on your cleanroom relative humidity (RH).
We have designed our ISO 5 cleanroom with RH (40 +/- 5 %). Among other cleanroom fabrication processes, the cleanroom will support EBeam nanolithography work.
The system to control RH within the required specs is quite expensive and I would like to know if anyone in the network is able to relax the RH specs, without compromising processes OR have alternative ways of locally controlling the RH, say in the actual litho. bay areas or hoods?

Your inputs are very much appreciated.

Thanks
Aju




Aju Jugessur Ph.D. IEEE Sr. Member
Director, Colorado Shared Instrumentation
in Nanofabrication and Characterization (COSINC) Facility
Member of Inclusive Culture Council (ICC)
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University of Colorado Boulder | College of Engineering & Applied Science
4001 Discovery Drive, N360G SEEC | Boulder, CO 80303| P: 303.735.5019
E-mail: aju.jugessur at colorado.edu<mailto:aju.jugessur at colorado.edu>
Personal Zoom link: https://cuboulder.zoom.us/my/ajugessur
www.colorado.edu/facility/cosinc<http://www.colorado.edu/facility/cosinc>

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