[labnetwork] Hold time after fusion bond
Macdonald, Robert (GE Research, US)
robert.macdonald at ge.com
Tue Oct 12 19:15:38 EDT 2021
I am looking for information on the limits of hold time after a fusion bond.
Whether it be Si to Si or Si to SiO2 or SiO2 to SiO2; Whether hydrophobic or hydrophilic, for what amount of time can the bonded pair be held prior to anneal?
I have not found a paper with this information. We have had success with times under sixteen hours. But we have not done a thorough study.
Any input welcome.
Thanks,
Rob MacDonald
GE Research
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