[labnetwork] ISO 5 Cleanroom RH

[mtkhbeis at gmail.com]

Aju 

As Rich said, I usually target 45+/-5% RH. You can use your litho/EBL suites to drive localized humidification. Highly recommend, putting in the infrastructure if you can into the rooftop air handlers. If you need dehumidification then do it in the air handler at the first stage. You will almost certainly always be demanding humidification of the litho space as the humidity diffuses into adjacent areas/bays. If humidifying in the air handler make sure you put in at least an RO system to minimize humidifier maintenance. 

A lower cost/minor mod solution can be more localized using in duct steam grids. If using localized generators, I highly recommend using clean steam fed by your UPW loop as servicing of standard humidifiers using city water is a nightmare due to mineral deposits - speaking from experience here. DRISTEEM is one vendor that makes all stainless construction units that can handle the corrosive nature of the UPW and will drive demand based on localized sensors in the litho bay vs. added cost and complexity of adding controls into your BMI infrastructure.  

Best,

Dr. Michael Khbeis
(C) 443.254.5192

> On Oct 12, 2021, at 4:36 AM, Aju Jugessur <Aju.Jugessur at colorado.edu> wrote:
> 
>  
> Hello all,
>  
> I am reaching out to obtain some inputs on your cleanroom relative humidity (RH).
> We have designed our ISO 5 cleanroom with RH (40 +/- 5 %). Among other cleanroom fabrication processes, the cleanroom will support EBeam nanolithography work.
> The system to control RH within the required specs is quite expensive and I would like to know if anyone in the network is able to relax the RH specs, without compromising processes OR have alternative ways of locally controlling the RH, say in the actual litho. bay areas or hoods?
>  
> Your inputs are very much appreciated.
>  
> Thanks
> Aju
>  
>  
>  
>  
> Aju Jugessur Ph.D. IEEE Sr. Member
> Director, Colorado Shared Instrumentation
> in Nanofabrication and Characterization (COSINC) Facility
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> University of Colorado Boulder | College of Engineering & Applied Science
> 4001 Discovery Drive, N360G SEEC | Boulder, CO 80303| P: 303.735.5019
> E-mail: aju.jugessur at colorado.edu
> Personal Zoom link: https://cuboulder.zoom.us/my/ajugessur
> www.colorado.edu/facility/cosinc
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