[labnetwork] Searching for a used desktop RIE etcher for SiN

[Owain Clark]

You could try JLS Designs in the UK, recently acquired by Plasmatherm. They make a range of small benchtop RIE systems and are open to customisation discussion.

O.

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Rachel Schoeppner
Sent: 31 March 2022 23:34
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Searching for a used desktop RIE etcher for SiN

CAUTION: This e-mail originated outside the University of Southampton.
Good Afternoon,


Our facility is trying to acquire a used smaller desktop RIE system specifically for etching SiN. Ideally we would like at least 2 gas inputs and the ability to process a few 3” wafers at a time, if possible. We have been looking into something like the Technics PE-IIA Etcher but haven’t been finding any that are currently for sale online. Does anyone on this forum know of any available for purchase that are in decent working condition?

Suggestions for other comparable tools or used equipment retailers would also be greatly appreciated so that I can expand my search online as well.


Best,

Rachel

—

Rachel Schoeppner, Ph.D

Quantum Structures Facility Manager
Confocal Microscopy & Spectroscopy Facility Manager

California NanoSystems Institute (CNSI)
University of California, Santa Barbara
rlschoeppner at ucsb.edu<mailto:rlschoeppner at ucsb.edu>
rachel at cnsi.ucsb.edu<mailto:rachel at cnsi.ucsb.edu>
(805)893-2296










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