[labnetwork] UV light bulbs for mask aligner

[Serkan Butun]

Hi Ana,

Paul asked me about our experience regarding the IDONUS UV LED (365 nm single wavelength) conversion. We have converted both MJB4 and MA6 about 3 years ago and we have been happy ever since. They come for the installation of the MA6 lamp and we installed the MJB4 (Covid happened). It is not very hard to do and they were very helpful during the whole process.

In terms of performance, I am very happy with the power levels. We use it mostly 20 mW/cm2 which is the lowest you can comfortably use on the MJB4. Uniformity is a lot better than the Hg lamp. The fact that is turns on instantly for the duration of exposure and off afterwards, there is no need for N2 cooling and no annoying 10 min worm up/cool down time. We did have Hg lamp explosions a couple of times in the past which were a pain because the elliptical mirrors were broken. With the LED we don’t have this risk.

We did have a few issues but it turned out that there were some loose electrical connections and IDONUS was again very helpful to diagnose the issue. The only real down side I have is the fact that the resist manufacturer datasheet exposure recommendations are not valid anymore. But we did our own tests and publish recommended exposure tables to our users.

You may contact me if you have further questions,

Best,
Serkan




Serkan Butun, PhD.
Research Associate, NUFAB
Northwestern University
Evanston, IL
Phone: 847-467-5959



From: Paul Maciel <paulmaciel at outlook.com>
Sent: Friday, April 01, 2022 9:54 AM
To: Serkan Butun <butun at northwestern.edu>
Subject: Re: [labnetwork] UV light bulbs for mask aligner

Hello Serkan,

How are you?  Hope all is well.

I have a favor to ask.  This message was posted on the labnetwork mailing list.  Could you post a reply to Ana <ana.n.cohen.ctr at army.mil><mailto:ana.n.cohen.ctr at army.mil> and the mailing list <labnetwork at mtl.mit.edu><mailto:labnetwork at mtl.mit.edu> and tell them of your experience with working with Idonus for the light source conversion?

If you could include my contact information it would be much appreciated.

Regards and have a good day,
---Paul

Paul Maciel
Sales and Technical Support
(408) 313-9329 or (603) 347-8820
paulmaciel at outlook.com<mailto:paulmaciel at outlook.com>


-------- Forwarded Message --------
Subject:
Re: [labnetwork] UV light bulbs for mask aligner
Date:
Thu, 31 Mar 2022 17:19:58 +0000
From:
Cohen, Ana N CTR USARMY DEVCOM ARL (USA) <ana.n.cohen.ctr at army.mil><mailto:ana.n.cohen.ctr at army.mil>
To:
na2661 at columbia.edu<mailto:na2661 at columbia.edu> <na2661 at columbia.edu><mailto:na2661 at columbia.edu>, labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu> <labnetwork at mtl.mit.edu><mailto:labnetwork at mtl.mit.edu>




Unfortunately have run into the same issue (checked with Atlanta Light Bulbs and BulbConnection.com). Seems like these distributors are just not getting UV lamp shipments at all. They can get an estimated shipping date for 350W bulbs, but is consistently pushed back each month. 1000W have less hope and are just described as “critical supply” with no shipping date in sight.

Considering people have luck with purchasing from straight from USHIO I’m going to look into that for our 350W bulbs. Unfortunately our MA8 doesn’t like USHIO (for reasons unbeknownst to us) and needs the harder to get 1000W. I may try contacting OSRAM directly for replacement. Does anyone have any experience there?

As for the LED option, I did ask SUSS directly what they could do for retrofitting and for my tools it’s in the ballpark of $75k (MA6) and $100k-$150k (MA8 Gen3) depending on what additional components may need to be replaced. Not sure I’m going to have much luck arguing adding that into our budget last minute. If anyone has found any Idonus or similar retrofit companies in the US, that would be amazing.



--
Ana N. Cohen [she/her/hers]
Photolithography Technician
US Army Research Laboratory
2800 Powder Mill Road
Adelphi, MD 20783
Tel: 301-394-1527
ana.n.cohen.ctr at army.mil<mailto:ana.n.cohen.ctr at army.mil>


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