[labnetwork] PlasmaTherm 790 Series PECVD

[Price, Aimee]

Hi Edward,
We do, here at Ohio State.  We run both nitride and oxide. In fact, we just resolved a computer issue last week.  Please message me directly and I’ll put you in touch with our engineer who works on it.

As an FYI, PlasmaTherm themselves are VERY responsive and helpful.  I can give you a contact if needed.

Best,
Aimee Bross Price

Manager, Nanofabrication
The Ohio State University
Nanotech West Lab
Institute for Materials Research
1381 Kinnear Road
Suite 100
Columbus, OH 43212
614-292-2753



From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Edward Gonzales
Sent: Monday, April 4, 2022 12:51 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] PlasmaTherm 790 Series PECVD

Is anybody still operating a PlasmaTherm 790 series PECVD that was built around 1999? If so, would you be willing to share any documentation that you have? Thanks, Edward Edward Gonzales Research Facilities Manager ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ ‍ 
Is anybody still operating a PlasmaTherm 790 series PECVD that was built around 1999? If so, would you be willing to share any documentation that you have?

Thanks,
Edward

Edward Gonzales
Research Facilities Manager
Colorado Shared Instrumentation in Nanofabrication and Characterization
COSINC
University of Colorado Boulder
303-735-1203 (office)
505-450-3338 (cell)
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