[labnetwork] Cleanroom Pressure Setpoint

[Collins, Deon]

The design of the building and setup of the lab will differ greatly. Your HVAC system design will have the largest effect on your setup as well. We have a recirculating system in our clean room with the Fume hoods as a means for exhaust to the labs. Certain labs do not have fume hoods so we adjust the air movement via VFD’s. Our Clean room in encircled by an enclosed corridor as well so air bleeds to the that corridor and is returned to the make up unit. We also have a system of balancing VAV’s to compensate for any variances.

If you have Fume hoods in the lab you will need enough make up air to feed the Fume hoods or you wont get enough flow through the face of the hood. So basically there is not a one case fits all answer.


Out photolithography lab with 6 8’ hoods has the fan speed control set at .30 inwc, the vav is currently at 70 with a supply air flow setpoint of 14000cfm. This unit supplies two labs across an isolated hallway. Note also these specifications will change between and iso 6 and iso 5 lab space.


Deon D. Collins

FACILITY MANAGER
Holonyak Lab
University of Illinois at Urbana-Champaign
208 N Wright St Rm. 248 | 2250
Urbana, IL 61801
217-300-7531 | deonc69 at illinois.edu<mailto:deonc69 at illinois.edu>


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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Adam Pettigrew
Sent: Wednesday, April 6, 2022 2:53 PM
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Cleanroom Pressure Setpoint

Hey All,

I am curious what others have as a setpoint for their cleanroom pressure relative to an unclean or lower classification cleanroom. I have found some information which suggests 10-15Pa is more than sufficient. We have ours set quite high at 60Pa but it typically sits at 45Pa. If you have tried adjusting the pressure, have you noticed any change in cleanliness/particle counts? Any information would be really appreciated.

Thanks,
Adam

--

Adam Pettigrew

Systems Technician

University of Alberta - nanoFAB

W1-028A ECERF Building

9107 - 116 Street

Edmonton, Alberta

Canada T6G 2V4 Ph: 587-879-1514
www.nanofab.ualberta.ca<https://urldefense.com/v3/__http:/www.nanofab.ualberta.ca/__;!!DZ3fjg!v8VeKmMIi7WoNinUEN-SbYaNPWkOlWAIuzI87oriZ593Uloq9RT0fD2OnX6GV6Zjfzk$>
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