[labnetwork] Cleanroom Pressure Setpoint

Iulian Codreanu codreanu at udel.edu
Thu Apr 7 11:20:06 EDT 2022


Hi Adam,

The two cleanrooms I helped build were set between 10 and 15 Pa.

Cheers,

Iulian

iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
http://udnf.udel.edu

On 4/6/2022 7:14 PM, Albert William (Bill) Flounders wrote:
> Adam,
> Interesting question.
> Ours is set at 0.08 - 0.1 inches water column = 20-25 Pa
> 45 - 60 Pa seems excessive.
>
> I reviewed "Cleanroom Technology" by William Whyte
> (2nd Ed, pg 69)
> "Differential pressure of 10 Pa between two cleanrooms, and 15 Pa
> between a cleanroom and an unclassified area, are reasonable
> minimum design pressures."
>
> I do not have data on particle count vs diff pressure.
> When we above ~ 0.2  (50 Pa) our doors begin to have trouble latching 
> automatically.
>
> Bill Flounders
> UC Berkeley
>
> On Wed, Apr 6, 2022 at 3:38 PM Adam Pettigrew <apettigr at ualberta.ca> 
> wrote:
>
>     Hey All,
>
>     I am curious what others have as a setpoint for their cleanroom
>     pressure relative to an unclean or lower classification cleanroom.
>     I have found some information which suggests 10-15Pa is more than
>     sufficient. We have ours set quite high at 60Pa but it typically
>     sits at 45Pa. If you have tried adjusting the pressure, have you
>     noticed any change in cleanliness/particle counts? Any information
>     would be really appreciated.
>
>     Thanks,
>     Adam
>
>     -- 
>
>     Adam Pettigrew
>
>     Systems Technician
>
>     University of Alberta - nanoFAB
>
>     W1-028A ECERF Building
>
>     9107 - 116 Street
>
>     Edmonton, Alberta
>
>     Canada T6G 2V4 Ph: 587-879-1514
>
>     www.nanofab.ualberta.ca <http://www.nanofab.ualberta.ca/>
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