[labnetwork] 500 nm AlN c-axis deposition service

[White, Robert D.]

Lab network,

I have been struggling to deposit well aligned c-axis oriented aluminum nitride films on Moly or Pt.  Is anyone aware of a deposition service that could provide a small run (< 10) quality piezoelectric AlN films on 4" substrates?  I could supply the oxidized silicon or SOI substrates either with or without the metal seed layer.

Thank you!

Rob

--
Robert White
Associate Professor
Tufts Mechanical Engineering
https://engineering.tufts.edu/me/people/faculty/robert-white
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