[labnetwork] RIE through Silicon
Chang, Long
lvchang at Central.UH.EDU
Mon Apr 11 17:09:45 EDT 2022
Hi Guys,
I have an Oxford RIE with backside Helium. I want to etch through the silicon wafer (380um thick). The largest pattern is a 1mm diameter circle. My plan is to ride the 4” sample wafer on a 4" carrier wafer with PR. Does anyone have a good solution to this problem?
Thanks,
Long
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20220411/7e248f33/attachment.html>
More information about the labnetwork
mailing list