[labnetwork] Refill ALD Cylinders

[Kyle Keenan]

Strem Chemical does this for us all the time, so long as you are replacing
like with like.

https://www.strem.com/

Kyle

On Thu, Apr 21, 2022 at 4:00 PM Tony L Olsen <tony.olsen at utah.edu> wrote:

> Does anybody have a source to re-use/refill ALD cylinders?  We have a
> number of spent cylinders (TMA, 3DMAS, TDMAHf, etc.).  It seems a waste to
> dispose of them, if they can be re-used.  I’ve found a couple companies
> that supposedly provide this service, but they have not responded to my
> inquiries.  Hoping there is a good track record with someone out there.
>
>
>
> tonyO
>
>
>
>
>
> Tony Olsen
>
> Nanofab Cleanroom Supervisor/Process Engineer
>
> University of Utah
>
> 36 S Wasatch Drive, Suite 2500
>
> Salt Lake City, UT  84112
>
> 801-587-0651
>
> www.nanofab.utah.edu
> <https://urldefense.com/v3/__http://www.nanofab.utah.edu__;!!IBzWLUs!B0ergMFRhjgMEL_aALldiw9Xee1A1WHwklgMgN4aKynjFuOqg2jVU8l-49LJC6rdTkzI$>
>
>
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-- 
Kyle Keenan

Laboratory Manager
Quattrone Nanofabrication Facility
University of Pennsylvania
P: 215-898-7560
F: 215-573-4925
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