[labnetwork] Refill ALD Cylinders

[Tony L Olsen]

Thanks everyone for the quick response.  Curiously, when I asked Strem a few years ago, they told me they don't refill.  I guess I'll have another discussion with them.

tonyO


From: Tony L Olsen <tony.olsen at utah.edu>
Sent: Thursday, April 21, 2022 10:51
To: Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Refill ALD Cylinders

Does anybody have a source to re-use/refill ALD cylinders?  We have a number of spent cylinders (TMA, 3DMAS, TDMAHf, etc.).  It seems a waste to dispose of them, if they can be re-used.  I've found a couple companies that supposedly provide this service, but they have not responded to my inquiries.  Hoping there is a good track record with someone out there.

tonyO


Tony Olsen
Nanofab Cleanroom Supervisor/Process Engineer
University of Utah
36 S Wasatch Drive, Suite 2500
Salt Lake City, UT  84112
801-587-0651
www.nanofab.utah.edu


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