[labnetwork] Refill ALD Cylinders

Fri Apr 22 09:05:01 EDT 2022

Hi Tony,
    One caveat to the refilling.  They will not put a different chemical in the cylinders that are DOT certified, i.e. those that have a welded lid as opposed to a Conflat lid.  So you can't say use an empty TMA and change to BDMS, instead you have to buy a new $6k cylinder.   Also, they will not fill the Conflat style as these are not DOT certified.

Regards,
  Michael
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From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Tony L Olsen <tony.olsen at utah.edu>
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Subject: Re: [labnetwork] Refill ALD Cylinders

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Thanks everyone for the quick response.  Curiously, when I asked Strem a few years ago, they told me they don’t refill.  I guess I’ll have another discussion with them.

tonyO

From: Tony L Olsen <tony.olsen at utah.edu>
Sent: Thursday, April 21, 2022 10:51
To: Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Refill ALD Cylinders

Does anybody have a source to re-use/refill ALD cylinders?  We have a number of spent cylinders (TMA, 3DMAS, TDMAHf, etc.).  It seems a waste to dispose of them, if they can be re-used.  I’ve found a couple companies that supposedly provide this service, but they have not responded to my inquiries.  Hoping there is a good track record with someone out there.

tonyO

Tony Olsen

Nanofab Cleanroom Supervisor/Process Engineer

University of Utah

36 S Wasatch Drive, Suite 2500

Salt Lake City, UT  84112

801-587-0651

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