[labnetwork] Regarding : Aluminium E-Beam Evaporation

[Zhichao Wang]

Chandan,

We use a pattern beam with the pattern sweeping/rotating constantly during
the deposition, and a fabmate crucible. The rest of the parameters are
pretty similar. The highest deposition rate we've tried is 15 Angstrom/s.

--
Chao

On Mon, Aug 29, 2022 at 8:07 AM Chandan H B <chandanachar95 at gmail.com>
wrote:

> Dear Lab network community,
>
> We are currently facing an issue in the deposition of Aluminium in one of
> our Electron beam evaporation tools, we tried intermetallic, fab mate,
> copper, glassy coated graphite, and graphite crucibles for the evaporation.
> It seems that none of them are working out.
> We see crucible gets broken at the initial deposition quite often.
>
> Are we missing out on any parameters unchecked?
> Kindly recommend us a few parameters or solutions for the same.
>
> Any suggestions/Inputs are highly appreciated.
> Thanks in advance!
>
> Regards,
> CHANDAN H B
> THIN FILM ENGINEER
>
> P.S: Here are a few parameters that are provided to the tool.
> Power: 10KW
> Voltage: 10KV constant
> Current: Variable
> Rise1 & Soak1: 5min & 1min /8min & 2min
> Rise1 Power: 4% (for intermetallic crucible)
> Rise2 & Soak2: 5min & 1min /8min & 2min
> Rise2 Power: 8% (for intermetallic crucible)
> Ramp down: 5min
> Rate of deposition: 0.1nm/sec
> Beam Pattern: Spot Beam at the center of the crucible
> Crucible Volume: 20cc
> Material fill %: As recommended 67-75%
>
>
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