[labnetwork] Regarding : Aluminium E-Beam Evaporation

[N Shane Patrick]

We also don’t use a crucible - for either Al or Cr actually.

N. Shane Patrick
Manager, Lab Operations and Safety
Electron Beam Lithography
Washington Nanofabrication Facility (WNF) 
National Nanotechnology Coordinated Infrastructure (NNCI)
University of Washington - NanoES
Fluke Hall 129, Box 352143
(206) 221-1045
patricns at uw.edu <mailto:patricns at uw.edu>
http://www.wnf.washington.edu/ <http://www.wnf.washington.edu/>

> On Aug 29, 2022, at 9:14 AM, Zhichao Wang <zhichaow at udel.edu> wrote:
> 
> Chandan,
> 
> We use a pattern beam with the pattern sweeping/rotating constantly during the deposition, and a fabmate crucible. The rest of the parameters are pretty similar. The highest deposition rate we've tried is 15 Angstrom/s. 
> 
> --
> Chao
> 
> On Mon, Aug 29, 2022 at 8:07 AM Chandan H B <chandanachar95 at gmail.com <mailto:chandanachar95 at gmail.com>> wrote:
> Dear Lab network community,
> 
> We are currently facing an issue in the deposition of Aluminium in one of our Electron beam evaporation tools, we tried intermetallic, fab mate, copper, glassy coated graphite, and graphite crucibles for the evaporation. It seems that none of them are working out. 
> We see crucible gets broken at the initial deposition quite often.
> 
> Are we missing out on any parameters unchecked?
> Kindly recommend us a few parameters or solutions for the same.
> 
> Any suggestions/Inputs are highly appreciated.
> Thanks in advance!
> 
> Regards,
> CHANDAN H B
> THIN FILM ENGINEER
> 
> P.S: Here are a few parameters that are provided to the tool.
> Power: 10KW
> Voltage: 10KV constant
> Current: Variable 
> Rise1 & Soak1: 5min & 1min /8min & 2min
> Rise1 Power: 4% (for intermetallic crucible)
> Rise2 & Soak2: 5min & 1min /8min & 2min
> Rise2 Power: 8% (for intermetallic crucible)
> Ramp down: 5min
> Rate of deposition: 0.1nm/sec
> Beam Pattern: Spot Beam at the center of the crucible
> Crucible Volume: 20cc
> Material fill %: As recommended 67-75%
> 
> 
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