[labnetwork] Regarding : Aluminium E-Beam Evaporation

[Michael Yakimov]

One of things which may hinder Al deposition from carbon crucible is Aluminum carbide formation on the surface. It will show up as yellow stuff on the surface after venting, eventually decomposing in the air.
It is a part of tribal knowledge for me; I couldn't find a good reference in 5 minutes.  there is mention of the effect here:
https://link.springer.com/article/10.1007/BF00792405
[https://media.springernature.com/w200/springer-static/cover/journal/11106.jpg]<https://link.springer.com/article/10.1007/BF00792405>
Industrial operation of vacuum aluminum evaporators made in refractory compound alloys - SpringerLink<https://link.springer.com/article/10.1007/BF00792405>
Vaporizing elements of various types and sizes are being produced from a TiB2-TiC alloy in the Special Design and Technology Department of the Institute of Materials Science, Academy of Sciences of the Ukrainian SSR, and widely used in vacuum deposition plants for the application of aluminum coatings to glass, plastics, fabrics, paper, metals, and film and other coiling materials. The ...
link.springer.com



________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Zhichao Wang <zhichaow at udel.edu>
Sent: Monday, August 29, 2022 12:14 PM
To: Chandan H B <chandanachar95 at gmail.com>
Cc: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Regarding : Aluminium E-Beam Evaporation

Chandan,

We use a pattern beam with the pattern sweeping/rotating constantly during the deposition, and a fabmate crucible. The rest of the parameters are pretty similar. The highest deposition rate we've tried is 15 Angstrom/s.

--
Chao

On Mon, Aug 29, 2022 at 8:07 AM Chandan H B <chandanachar95 at gmail.com<mailto:chandanachar95 at gmail.com>> wrote:
Dear Lab network community,

We are currently facing an issue in the deposition of Aluminium in one of our Electron beam evaporation tools, we tried intermetallic, fab mate, copper, glassy coated graphite, and graphite crucibles for the evaporation. It seems that none of them are working out.
We see crucible gets broken at the initial deposition quite often.

Are we missing out on any parameters unchecked?
Kindly recommend us a few parameters or solutions for the same.

Any suggestions/Inputs are highly appreciated.
Thanks in advance!

Regards,
CHANDAN H B
THIN FILM ENGINEER

P.S: Here are a few parameters that are provided to the tool.
Power: 10KW
Voltage: 10KV constant
Current: Variable
Rise1 & Soak1: 5min & 1min /8min & 2min
Rise1 Power: 4% (for intermetallic crucible)
Rise2 & Soak2: 5min & 1min /8min & 2min
Rise2 Power: 8% (for intermetallic crucible)
Ramp down: 5min
Rate of deposition: 0.1nm/sec
Beam Pattern: Spot Beam at the center of the crucible
Crucible Volume: 20cc
Material fill %: As recommended 67-75%


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