[labnetwork] Regarding : Aluminium E-Beam Evaporation

[Shimon Eliav]

Hi Chandan,

Here is my two cents to this nice discussion.

I agree with Ryan, Brent and Ted: the simple spacer does the job. After some trials, here at Hebrew University we use intermetallic crucibles with an special format manufactured by Angstrom Engineering that mimics the spacer effect. Here is the description:
[cid:image001.png at 01D8BD5A.F32F9DC0]
It is quite expensive, 245$ each, but lasts for many evaporations. We also have slow heat up and cooling down ramps.

Once I saw at Princeton a simple thermal evaporator using a Graphite boat, also from Angstrom. The trick they use there is to consume all the Al in the boat in the end of the evaporation. Seems to work nicely.

Please find attached the summary of all answers.

Regards,

Shimon
Hebrew University of Jerusalem

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Chandan H B
Sent: Monday, 29 August 2022 9:04
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Regarding : Aluminium E-Beam Evaporation

Dear Lab network community,

We are currently facing an issue in the deposition of Aluminium in one of our Electron beam evaporation tools, we tried intermetallic, fab mate, copper, glassy coated graphite, and graphite crucibles for the evaporation. It seems that none of them are working out.
We see crucible gets broken at the initial deposition quite often.

Are we missing out on any parameters unchecked?
Kindly recommend us a few parameters or solutions for the same.

Any suggestions/Inputs are highly appreciated.
Thanks in advance!

Regards,
CHANDAN H B
THIN FILM ENGINEER

P.S: Here are a few parameters that are provided to the tool.
Power: 10KW
Voltage: 10KV constant
Current: Variable
Rise1 & Soak1: 5min & 1min /8min & 2min
Rise1 Power: 4% (for intermetallic crucible)
Rise2 & Soak2: 5min & 1min /8min & 2min
Rise2 Power: 8% (for intermetallic crucible)
Ramp down: 5min
Rate of deposition: 0.1nm/sec
Beam Pattern: Spot Beam at the center of the crucible
Crucible Volume: 20cc
Material fill %: As recommended 67-75%


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