[labnetwork] BCL3 question

[Morrison, Richard H., Jr]

Thanks Everyone for your ideas



Rick





From: Albert William (Bill) Flounders <bill_flounders at berkeley.edu>
Sent: Thursday, December 1, 2022 4:43 PM
To: Collins, Deon <deonc69 at illinois.edu>
Cc: Morrison, Richard H., Jr <rmorrison at draper.com>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] BCL3 question



All,

Tom Britton has provided a wide range of excellent info to many of us.

I'm confident some supplier does recommend those storage limits and

large fabs have no trouble meeting them.

After review, we realized to meet these limits we would be disposing of

almost all of our gases - so we are going to keep drinking the old milk

regardless of what the carton says.



The one exception I will note is diborane - which is the gas with the shortest

recommended storage time on this list. We routinely had clogged injectors on

an lpcvd system delivering B2H6 and bottle change often solved the issue.

Polymerization of diborane is well documented and there's even a thread from

2012 on lab net discussing the issue.



Regards

Bill Flounders

UC Berkeley





On Thu, Dec 1, 2022 at 1:02 PM Collins, Deon <deonc69 at illinois.edu<mailto:deonc69 at illinois.edu>> wrote:

   I can tell you we personally had a BCL3 cylinder that was much, much, older than what is listed on their standards. It performed excellent till the day it was changed out three years ago. That cylinder is still being used on one of our cleanroom process tools with great results. Purity has an affect as well.







   From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Tom Britton
   Sent: Wednesday, November 30, 2022 10:56 AM
   To: Morrison, Richard H., Jr <rmorrison at draper.com<mailto:rmorrison at draper.com>>; labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
   Subject: Re: [labnetwork] BCL3 question



   Hi Richard,



   I got this a while back from I believe Air Liquide, but I’m not 100% positive of the source. Hopefully it helps.



   Happy Holidays,



   Tom



   Tom Britton

   Director of Sales

   Critical Systems, Inc.

   Direct: 208.890.1417

   Office: 877.572.5515

   Skype: tombrittoncsi

   www.CriticalSystemsInc.com<https://urldefense.proofpoint.com/v2/url?u=http-3A__www.criticalsystemsinc.com_&d=DwMFAg&c=euGZstcaTDllvimEN8b7jXrwqOf-v5A_CdpgnVfiiMM&r=D1j3aH4gf_B24MHGaru0vse-Gx_NllaIE8kLU3iLsM0&m=Zc1q2ymDPllIVSzjmSZUdSs5CpFTu1sKiLVG7DOoSNE&s=tJB4xuByIZ7Ff61fhBJGZ4iH3G9CczR1NFyf0xP_86A&e=>







   Note: 7 days per week Technical Support

   Phone: 1-888-218-6308

   Email: Fieldservices at criticalsystemsinc.com<mailto:Fieldservices at criticalsystemsinc.com>







   From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Morrison, Richard H., Jr
   Sent: Wednesday, November 30, 2022 7:53 AM
   To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
   Subject: [labnetwork] BCL3 question



   HI everyone,



   Does anybody have an estimate on how long BCl3 last in a cylinder. I have a cylinder of BCL3 install in 2013 and recently the etch rate has dropped, does BCl3 go bad? The gas cabinet scale is not in alarm.



   Rick





   Richard Morrison

   PMTS

   Draper Laboratory

   555 Technology Square

   Cambridge Ma  02139

   Office: 617-258-3420

   Cell: 508-930-3461



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