[labnetwork] BCL3 question

[Albert William (Bill) Flounders]

All,
Tom Britton has provided a wide range of excellent info to many of us.
I'm confident some supplier does recommend those storage limits and
large fabs have no trouble meeting them.
After review, we realized to meet these limits we would be disposing of
almost all of our gases - so we are going to keep drinking the old milk
regardless of what the carton says.

The one exception I will note is diborane - which is the gas with the
shortest
recommended storage time on this list. We routinely had clogged injectors
on
an lpcvd system delivering B2H6 and bottle change often solved the issue.
Polymerization of diborane is well documented and there's even a thread
from
2012 on lab net discussing the issue.

Regards
Bill Flounders
UC Berkeley


On Thu, Dec 1, 2022 at 1:02 PM Collins, Deon <deonc69 at illinois.edu> wrote:

> I can tell you we personally had a BCL3 cylinder that was much, much,
> older than what is listed on their standards. It performed excellent till
> the day it was changed out three years ago. That cylinder is still being
> used on one of our cleanroom process tools with great results. Purity has
> an affect as well.
>
>
>
>
>
>
>
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> * On Behalf Of *Tom
> Britton
> *Sent:* Wednesday, November 30, 2022 10:56 AM
> *To:* Morrison, Richard H., Jr <rmorrison at draper.com>;
> labnetwork at mtl.mit.edu
> *Subject:* Re: [labnetwork] BCL3 question
>
>
>
> Hi Richard,
>
>
>
> I got this a while back from I believe Air Liquide, but I’m not 100%
> positive of the source. Hopefully it helps.
>
>
>
> Happy Holidays,
>
>
>
> Tom
>
>
>
> Tom Britton
>
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> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of *Morrison,
> Richard H., Jr
> *Sent:* Wednesday, November 30, 2022 7:53 AM
> *To:* labnetwork at mtl.mit.edu
> *Subject:* [labnetwork] BCL3 question
>
>
>
> HI everyone,
>
>
>
> Does anybody have an estimate on how long BCl3 last in a cylinder. I have
> a cylinder of BCL3 install in 2013 and recently the etch rate has dropped,
> does BCl3 go bad? The gas cabinet scale is not in alarm.
>
>
>
> Rick
>
>
>
>
>
> Richard Morrison
>
> PMTS
>
> Draper Laboratory
>
> 555 Technology Square
>
> Cambridge Ma  02139
>
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>
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