[labnetwork] BCL3 question

[Collins, Deon]

I can tell you we personally had a BCL3 cylinder that was much, much, older than what is listed on their standards. It performed excellent till the day it was changed out three years ago. That cylinder is still being used on one of our cleanroom process tools with great results. Purity has an affect as well.



From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Tom Britton
Sent: Wednesday, November 30, 2022 10:56 AM
To: Morrison, Richard H., Jr <rmorrison at draper.com>; labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] BCL3 question

Hi Richard,

I got this a while back from I believe Air Liquide, but I'm not 100% positive of the source. Hopefully it helps.

Happy Holidays,

Tom

Tom Britton
Director of Sales
Critical Systems, Inc.
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From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Morrison, Richard H., Jr
Sent: Wednesday, November 30, 2022 7:53 AM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] BCL3 question

HI everyone,

Does anybody have an estimate on how long BCl3 last in a cylinder. I have a cylinder of BCL3 install in 2013 and recently the etch rate has dropped, does BCl3 go bad? The gas cabinet scale is not in alarm.

Rick


Richard Morrison
PMTS
Draper Laboratory
555 Technology Square
Cambridge Ma  02139
Office: 617-258-3420
Cell: 508-930-3461

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