[labnetwork] BCL3 question

Tom Britton tbritton at criticalsystemsinc.com
Fri Dec 2 10:46:51 EST 2022


I will add in that this is from the “gas supplier”, and they may have a vested interest in customer’s continuing to buy fresh gases. Also, they could be leaning conservative as the quality of the gas that is needed for 10nm HVM production and that which is needed for research may be quite different.

Happy holidays!

Tom

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Albert William (Bill) Flounders
Sent: Thursday, December 1, 2022 2:43 PM
To: Collins, Deon <deonc69 at illinois.edu>
Cc: labnetwork at mtl.mit.edu
Subject: Re: [labnetwork] BCL3 question


[EXTERNAL EMAIL] This message originated outside of your organization. Remember to always use caution when opening attachments or clicking on links.
All,
Tom Britton has provided a wide range of excellent info to many of us.
I'm confident some supplier does recommend those storage limits and
large fabs have no trouble meeting them.
After review, we realized to meet these limits we would be disposing of
almost all of our gases - so we are going to keep drinking the old milk
regardless of what the carton says.

The one exception I will note is diborane - which is the gas with the shortest
recommended storage time on this list. We routinely had clogged injectors on
an lpcvd system delivering B2H6 and bottle change often solved the issue.
Polymerization of diborane is well documented and there's even a thread from
2012 on lab net discussing the issue.

Regards
Bill Flounders
UC Berkeley


On Thu, Dec 1, 2022 at 1:02 PM Collins, Deon <deonc69 at illinois.edu<mailto:deonc69 at illinois.edu>> wrote:
I can tell you we personally had a BCL3 cylinder that was much, much, older than what is listed on their standards. It performed excellent till the day it was changed out three years ago. That cylinder is still being used on one of our cleanroom process tools with great results. Purity has an affect as well.



From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Tom Britton
Sent: Wednesday, November 30, 2022 10:56 AM
To: Morrison, Richard H., Jr <rmorrison at draper.com<mailto:rmorrison at draper.com>>; labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] BCL3 question

Hi Richard,

I got this a while back from I believe Air Liquide, but I’m not 100% positive of the source. Hopefully it helps.

Happy Holidays,

Tom

Tom Britton
Director of Sales
Critical Systems, Inc.
Direct: 208.890.1417
Office: 877.572.5515
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From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Morrison, Richard H., Jr
Sent: Wednesday, November 30, 2022 7:53 AM
To: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: [labnetwork] BCL3 question

HI everyone,

Does anybody have an estimate on how long BCl3 last in a cylinder. I have a cylinder of BCL3 install in 2013 and recently the etch rate has dropped, does BCl3 go bad? The gas cabinet scale is not in alarm.

Rick


Richard Morrison
PMTS
Draper Laboratory
555 Technology Square
Cambridge Ma  02139
Office: 617-258-3420
Cell: 508-930-3461

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