[labnetwork] BCL3 question
Iulian Codreanu
codreanu at udel.edu
Fri Dec 2 16:32:49 EST 2022
Hi Everyone,
My current supplier lists 24-36 months for the gases I use; they are
unable to supply BCl3 at this time so there is no shelf life listed. I
do not use B2H6.
I noticed that on the list Tom shared, H2 is listed at 12 months; that
seems awfully short - my supplier lists 36 months but most of us
probably regard that as being on the conservative side. Also, O2 and Ar
seem to go bad in 3 years...
Happy holidays,
Iulian
iulian Codreanu, Ph.D.
Director, Nanofabrication Facility
University of Delaware
Harker ISE Lab, Room 163
221 Academy Street
Newark, DE 19716
302-831-2784
http://udnf.udel.edu
On 12/2/2022 10:46 AM, Tom Britton wrote:
>
> I will add in that this is from the “gas supplier”, and they may have
> a vested interest in customer’s continuing to buy fresh gases. Also,
> they could be leaning conservative as the quality of the gas that is
> needed for 10nm HVM production and that which is needed for research
> may be quite different.
>
> Happy holidays!
>
> Tom
>
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of
> *Albert William (Bill) Flounders
> *Sent:* Thursday, December 1, 2022 2:43 PM
> *To:* Collins, Deon <deonc69 at illinois.edu>
> *Cc:* labnetwork at mtl.mit.edu
> *Subject:* Re: [labnetwork] BCL3 question
>
> *[EXTERNAL EMAIL]*This message originated outside of your
> organization. Remember to always use caution when opening attachments
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>
> All,
>
> Tom Britton has provided a wide range of excellent info to many of us.
>
> I'm confident some supplier does recommend those storage limits and
>
> large fabs have no trouble meeting them.
>
> After review, we realized to meet these limits we would be disposing of
>
> almost all of our gases - so we are going to keep drinking the old milk
>
> regardless of what the carton says.
>
> The one exception I will note is diborane - which is the gas with the
> shortest
>
> recommended storage time on this list. We routinely had clogged
> injectors on
>
> an lpcvd system delivering B2H6 and bottle change often solved the issue.
>
> Polymerization of diborane is well documented and there's even a
> thread from
>
> 2012 on lab net discussing the issue.
>
> Regards
>
> Bill Flounders
>
> UC Berkeley
>
> On Thu, Dec 1, 2022 at 1:02 PM Collins, Deon <deonc69 at illinois.edu> wrote:
>
> I can tell you we personally had a BCL3 cylinder that was much,
> much, older than what is listed on their standards. It performed
> excellent till the day it was changed out three years ago. That
> cylinder is still being used on one of our cleanroom process tools
> with great results. Purity has an affect as well.
>
> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of
> *Tom Britton
> *Sent:* Wednesday, November 30, 2022 10:56 AM
> *To:* Morrison, Richard H., Jr <rmorrison at draper.com>;
> labnetwork at mtl.mit.edu
> *Subject:* Re: [labnetwork] BCL3 question
>
> Hi Richard,
>
> I got this a while back from I believe Air Liquide, but I’m not
> 100% positive of the source. Hopefully it helps.
>
> Happy Holidays,
>
> Tom
>
> Tom Britton
>
> Director of Sales
>
> /Critical Systems, Inc./
>
> Direct: 208.890.1417
>
> Office: 877.572.5515
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> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> *On Behalf Of
> *Morrison, Richard H., Jr
> *Sent:* Wednesday, November 30, 2022 7:53 AM
> *To:* labnetwork at mtl.mit.edu
> *Subject:* [labnetwork] BCL3 question
>
> HI everyone,
>
> Does anybody have an estimate on how long BCl3 last in a cylinder.
> I have a cylinder of BCL3 install in 2013 and recently the etch
> rate has dropped, does BCl3 go bad? The gas cabinet scale is not
> in alarm.
>
> Rick
>
> Richard Morrison
>
> PMTS
>
> Draper Laboratory
>
> 555 Technology Square
>
> Cambridge Ma 02139
>
> Office: 617-258-3420
>
> Cell: 508-930-3461
>
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