[labnetwork] Desktop RIE's

Martin,Michael David michael.martin at louisville.edu
Tue Feb 8 16:48:13 EST 2022


Hi Fab folks,
    Our beloved March CS-1701 has bit the dust (more or less) so we are in the market for a new-to-us desktop RIE.  We have a Trion, but would really like a simple to use, reasonably inexpensive capacitively coupled RIE.  Would you be willing to provide some suggestions for a 6 to 8" tool?  We are willing to consider new, used or even a surplused CS-1701 should you have one stashed in a closet somewhere.

Regards,
   Michael


Senior Process Engineer

Micro/Nano Technology Center

University of Louisville

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