[labnetwork] Drytek Dry Pumps

[Hollingshead, Dave]

Thanks everyone for the quick and helpful input on this! Hope you all have a great weekend.

-Dave

From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Hollingshead, Dave
Sent: Friday, July 29, 2022 10:40
To: labnetwork at mtl.mit.edu
Subject: [labnetwork] Drytek Dry Pumps

Hi all, Does anyone have experience (good, bad, or otherwise) with Drytek dry screw pumps (specifically as a turbo backing pump for an ICP etcher)? Most of the dry pumps in our lab are Edwards, but since lead times have recently become a major

Hi all,

Does anyone have experience (good, bad, or otherwise) with Drytek dry screw pumps (specifically as a turbo backing pump for an ICP etcher)? Most of the dry pumps in our lab are Edwards, but since lead times have recently become a major issue we are considering alternatives.

Thanks,
-Dave

Dave Hollingshead
Manager of Research Operations – Nanotech West Lab
The Ohio State University
Suite 100, 1381 Kinnear Road, Columbus, OH 43212
614.292.1355 Office
hollingshead.19 at osu.edu<mailto:hollingshead.19 at osu.edu> osu.edu<http://osu.edu/>

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